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6inch 150mm SIC Wafer 4H-N Type SiC Substrate Dummy Production And Zero Grade

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6inch 150mm SIC Wafer 4H-N Type SiC Substrate Dummy Production And Zero Grade

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Brand Name : ZMKJ

Model Number : 6inch 150mm SiC Substrate

Certification : ROHS

Place of Origin : CHINA

MOQ : 2pcs

Price : by case

Payment Terms : T/T, Western Union, MoneyGram

Supply Ability : 1-500pcs/month

Delivery Time : 1-6weeks

Packaging Details : single wafer package in 100-grade cleaning room

Material : SiC single crystal 4H-N 4H-Si

Grade : Production Dummy and Zero MPD

Thicnkss : 0.35mm and 0.5mm

LTV/TTV/Bow Warp : ≤5 um/≤15 u/$40 um/≤60 um

Application : For MOS and Semiconductor

Diameter : 6inch 150mm

Color : Green Tea

MPD : <2cm-2 for Zero MPD production grade

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Silicon Carbide (SiC) Substrates 4H and 6H Epi-Ready SiC Substrate/Wafers (150mm, 200mm) Silicon Carbide(SiC) wafer N Type
6inch SIC Wafer 4H-N Type production grade sic epitaxial wafers GaN layer on sic
 
About Silicon Carbide (SiC)Crystal  
 

Shanghai Famous Trade Co., Ltd 150 mm SiC wafers offer device manufacturers a consistent, high-quality substrate for developing high-performance power devices. Our SiC substrates are produced from crystal ingots of the highest quality using proprietary state-of-the-art physical vapor transport (PVT) growth techniques and computer-aided manufacturing (CAM). Advanced wafer manufacturing techniques are used to convert ingots into wafers to ensure the consistent, reliable quality you need.

Key features

  • Optimizes targeted performance and total cost of ownership for next-generation power electronics devices
  • Large diameter wafers for improved economies of scale in semiconductor manufacturing
  • Range of tolerance levels to meet specific device fabrication needs
  • High crystal quality
  • Low defect densities

Sized for improved production

With the 6inch 150 mm SiC wafer size, we offer manufacturers the ability to leverage improved economies of scale compared with 100 mm device fabrication. Our 6inch 150 mm SiC Wafers offer consistently excellent mechanical characteristics to ensure compatibility with existing and developing device fabrication processes.

                      6inch 200mm N-Type SiC Substrates Specifications
PropertyP-MOS GradeP-SBD GradeD Grade 
Crystal Specifications 
Crystal Form4H 
Polytype AreaNone PermittedArea≤5% 
(MPD) a≤0.2 /cm2≤0.5 /cm2≤5 /cm2 
Hex PlatesNone PermittedArea≤5% 
Hexagonal PolycrystalNone Permitted 
Inclusions aArea≤0.05%Area≤0.05%N/A 
Resistivity0.015Ω•cm—0.025Ω•cm0.015Ω•cm—0.025Ω•cm0.014Ω•cm—0.028Ω•cm 
(EPD)a≤4000/cm2≤8000/cm2N/A 
(TED)a≤3000/cm2≤6000/cm2N/A 
(BPD)a≤1000/cm2≤2000/cm2N/A 
(TSD)a≤600/cm2≤1000/cm2N/A 
(Stacking Fault)≤0.5% Area≤1% AreaN/A 
Surface Metal Contamination(Al, Cr, Fe, Ni, Cu, Zn, Pb, Na, K, Ti, Ca ,V, Mn) ≤1E11 cm-2 
Mechanical Specifications 
Diameter150.0 mm +0mm/-0.2mm 
Surface OrientationOff-Axis:4°toward <11-20>±0.5° 
Primary Flat Length47.5 mm ± 1.5 mm 
Secondary Flat LengthNo Secondary Flat 
Primary Flat Orientation<11-20>±1° 
Secondary Flat OrientationN/A 
Orthogonal Misorientation±5.0° 
Surface FinishC-Face:Optical Polish,Si-Face:CMP 
Wafer EdgeBeveling 
Surface Roughness
(10μm×10μm)
Si Face Ra≤0.20 nm ; C Face Ra≤0.50 nm 
Thickness a350.0μm± 25.0 μm 
LTV(10mm×10mm)a≤2μm≤3μm 
(TTV)a≤6μm≤10μm 
(BOW) a≤15μm≤25μm≤40μm 
(Warp) a≤25μm≤40μm≤60μm 
Surface Specifications 
Chips/IndentsNone Permitted ≥0.5mm Width and DepthQty.2 ≤1.0 mm Width and Depth 
Scratches a
(Si Face,CS8520)
≤5 and Cumulative Length≤0.5×Wafer Diameter≤5 and Cumulative Length≤1.5× Wafer Diameter 
TUA(2mm*2mm)≥98%≥95%N/A 
CracksNone Permitted 
ContaminationNone Permitted 
Edge Exclusion3mm 
     

6inch 150mm SIC Wafer 4H-N Type SiC Substrate Dummy Production And Zero Grade6inch 150mm SIC Wafer 4H-N Type SiC Substrate Dummy Production And Zero Grade6inch 150mm SIC Wafer 4H-N Type SiC Substrate Dummy Production And Zero Grade

 

CATALOGUE   COMMON  SIZE   In  OUR INVENTORY LIST   

4H-N Type / High Purity  SiC wafer/ingots

2 inch 4H N-Type SiC wafer/ingots
3 inch 4H N-Type SiC wafer
4 inch 4H N-Type SiC wafer/ingots
6 inch 4H N-Type SiC wafer/ingots

 
4H Semi-insulating /  High Purity SiC wafer

2 inch 4H Semi-insulating SiC wafer
3 inch 4H Semi-insulating SiC wafer
4 inch 4H Semi-insulating SiC wafer
6 inch 4H Semi-insulating SiC wafer
 
 
6H N-Type SiC wafer
2 inch 6H N-Type SiC wafer/ingot

 
 Customzied size for 2-6inch 
 

>Packaging – Logistics

Concerns about each detail of the package, cleaning, anti-static, and shock treatment.
According to the quantity and shape of the product, we will take a different packaging process! Almost by single wafer cassettes or 25pcs cassettes in the 100-grade cleaning room.
 


Product Tags:

150mm SIC Wafer

      

4H-N Type SiC Substrate

      

Zero Grade Silicon Carbide Wafer

      
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